Motor: 5-phase stepping motor
Positioning accuracy: 6 µm*1
Repeatability: ±0.5 µm*1
Stage stroke distance: 15 mm 0.59″
Resolution: 0.05 µm/pulse

High-Precision Motor Control – Equipped with a 5-phase stepping motor, the unit ensures smooth, stable, and accurate stage movements essential for 3D imaging and measurement applications.
Micron-Level Accuracy – With a positioning accuracy of 6 µm and repeatability of ±0.5 µm, it delivers reliable results for even the most delicate measurement tasks.
Extended Measurement Range – A stage stroke distance of 15 mm allows versatile sample positioning and examination across a wide variety of object sizes and geometries.
Ultra-Fine Resolution – Achieves an impressive resolution of 0.05 µm/pulse, enabling precise 3D reconstruction and detailed surface characterization.

The Keyence VHX-S15CE 3D Auto Measurement Unit (Controller) is a precision-driven stage controller designed to complement advanced digital microscopes and imaging systems, ensuring unparalleled accuracy in three-dimensional observation and measurement. Built to handle the growing demands of high-resolution inspection and analysis, the unit integrates sophisticated motor control with robust mechanical stability, making it an indispensable tool for researchers, engineers, and quality assurance professionals.

At its core, the VHX-S15CE is powered by a 5-phase stepping motor, a design choice that significantly enhances stability and minimizes vibration during operation. This enables users to capture sharp, distortion-free images even when working at high magnification levels. The motorized stage movement ensures smooth travel and precise positioning, critical for 3D surface profiling, multi-layer imaging, and automated inspection routines.

One of the defining strengths of this unit is its micron-level accuracy and repeatability. With a positioning accuracy of 6 µm and repeatability within ±0.5 µm, the VHX-S15CE guarantees consistent measurements across repeated observations. This makes it highly suitable for environments where traceability and measurement reliability are paramount, such as semiconductor inspection, medical device evaluation, or fine material research.

The stage stroke distance of 15 mm further expands the versatility of the system, allowing users to examine larger samples or navigate across regions of interest without manual repositioning. This degree of automated control improves both efficiency and accuracy in workflows where manual handling could introduce error or variability.

Another standout feature is its ultra-fine resolution of 0.05 µm per pulse, which allows the system to capture even the most subtle variations in surface topography. This is particularly advantageous in applications such as microelectronics, material science, or precision engineering, where the smallest deviations in surface height or structural consistency can impact overall quality and performance.

Designed for integration into advanced measurement environments, the VHX-S15CE not only enhances productivity but also ensures reliability and reproducibility of results. Its robust design reduces the margin of error in automated 3D imaging tasks, offering laboratories and manufacturing facilities the assurance needed for high-stakes evaluations.

In summary, the Keyence VHX-S15CE provides a powerful combination of precision, resolution, and efficiency, serving as a vital component in achieving accurate 3D measurement and analysis. By automating stage control with cutting-edge technology, it enables users to unlock new levels of detail and reliability in microscopic observation, ensuring results that meet the highest standards of modern inspection and research.